Multi Project Wafer, MPW, for MEMS applications (Note, Contents of project subject to change. Pleas contact Peter Enoksson.


Task
The project consist of designing and run a MPW.
Short description of device
The wafer will have a three (or four) different devices e.g. an accelerometer, a pressure sensor, a flow sensor or a resonator. The processes should, if possible, be compatible to be run in the education clean room, clean room 2. The process flow has to be the same for all the devices and all the devices will be implemented in the same mask set.
Processes
Design (different designs and processes will be discussed, the process and design will be "copied" from literature)
CAD of mask set (the CAD of the mask will be made at the Solid State Electronics laboratory in Cadens)
Process run (each student will run at least one process step)
Characterization
Evaluation of each MEMS-device (the evaluation is intended to be run at the Solid State Electronics laboratory)
Number of students    2

Contact Person    Peter Enoksson