The course book:

"Introduction to Microelectronic Fabrication"  
by Richard C. Jaeger (ISBN: 0201146959, there is also newer edition)

Second-hand books can possibly be available.
Check here if a link exists.

Also can be used: The Materials Science of Thin Films by Milton Ohring; Publisher: Academic Press 2001; ISBN: 0125249756. Visit to find best prices and delivery times. for details, or at or at  The first edition, ISBN 012524990X can be used as well.