Second-hand books can possibly be available.
Check here if a link exists.
"Introduction to Microelectronic Fabrication"
by Richard C. Jaeger (ISBN: 0201146959, there is also newer edition)
Second-hand books can possibly be available.
Check here if a link exists.
Also can be used: The
Materials Science
of Thin Films by Milton Ohring; Publisher: Academic Press 2001; ISBN:
0125249756. Visit http://www.fetchbook.info to find best prices and
delivery
times. http://www.check.chalmers.se/stu/cremona/index.asp
for details, or at http://www.amazon.co.uk or at http://www.half.ebay.com/. The first edition, ISBN 012524990X can be used as well.
