P.7 Fabrication and evaluation of semiconductor laser
Task
To design, fabricate and evaluate an edge-emitting (FP) broad-area semiconductor
laser.
Short description of device
Broad-area FP lasers are mainly used for material characterization. The lasers
are fairly simple in their design. P and N-contacts define the current injection
area, and cleaved facets define the length of the laser cavity.
Processes
Since planning of the process is within the task, this description will only
mention some of the process steps involved: Cleaving of wafer, photolithography,
metal deposition, wet etching, annealing, cleaving of laser bars.
Characterization
Optical and electrical characterization, and from the measurement result
derive important material parameters.
Peter Modh