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FABRICATION PROCESSES

E-Beam Processes | Wet Processes

File Conversion to JEOL format | Proximity Correction

L-Edit | AutoCAD

Links to Other Processes found in MC2 Webpages

Mask Fabrication | PROXECCO Manual 1 | PROXECCO Manual 2

FILE CONVERSION FROM AUTOCAD TO JEOL51 FORMAT

This is the procedure for the old e-beam machine (JEOL JBX-5DII).

1. Edit your pattern in AutoCAD.

2. Export your pattern *.dxf.

3. Upload the *.dxf file(s) to the server mc2axp1.mc2.chalmers.se in the directory CAD_DATA, i. e. SYS$USER:[ACCOUNTNAME.CAD_DATA].

   a. Open the F-Secure SSH File Transfer and log-in to the mc2-p007 server.

   b. Simply drag the DXF file to the desired folder in the SECURE SHELL window.

   c. Log-out of the mc2-p007 server and log-in to mc2-p004 server (formerly vicad1)

   d. COPY the DXF file to the CAD_DATA directory using the command

       copy mc2$axp1:[accountname.saveddirectory]filename.dxf [accountname]

4. Convert the DXF file to a GDS file, by typing in DXFCNV -I. It will prompt for you to enter the filename of the file you want to convert. During the conversion, it will ask you to change some parameters.

5. After the conversion, it will produce the desired GDS file and a LTT file. The LTT file lists down the layerdown corresponding to the layernumber. You can view it simply by typing: "TYPE FILENAME.LTT". Write down the layernumber(s) corresponding to the layer(s) you wish to expose.

6. Do GDSRECFIX for each gds file you transferred. Syntax: GDSRECFIX FILENAME.GDS

7. Go to the directory SCRIPTS.

8. Edit FILENAME.JBX file that you are going to use.

9. Do EBCONV. Syntax: EBCONV FILENAME.JBX /OVERRIDE for all the files. For each file, change the INPUT_FILENAME, the OUTPUT_FILENAME (the recommended is mc2$axp1:[accountname.jeol51]), the LAYER_NAME, and the LAYER number.

10.  To check the structure and see if the files are converted correctly into JEOL51 format, you can do either one:

    1. Type JBXFILER on the terminal.

    2. Select the *.j51 file you want to see by clicking once.

    3. Click command (C) and convert to graphic data.

    4. Input and output directory is in SYS$DISK. Put the same filename as the j51 file

    5. Select the *.pchk file you want to see.

    6. Click command (C) and display data.

    7. Click DRAW to see the whole picture.

    OR

    1. Use the software J51VMDI.EXE which you can get from Bengt or from the MC2AXP1 server if you have an fy.chalmers.se account.

    2. Simply drag the *.j51 file you want to look at to the icon of J51VMDI.EXE.

    3. Choose FILL 'ON' and SHOT '8 COLORS' or '16 COLORS', if you have shot modulation.

11.  Go to fyvax7. You can do this by typing this command: set host fyvax7, and then log-in.

12. If you have your J51 files in your directory in MC2AXP1, then steps 12-13 are not necessary.

13.  To transfer your file from VICAD1 to FYVAX7, type: COPY VICAD1::[USERNAME.JEOL51]FILENAME.J51;* FILENAME.J51;*.

14.  Do GETSTEP to determine the step parameters. Input the parameters to be used for exposure.

15.  Do PREADSX. Use the values for the SCAN STEP and RESIZE determined from GETSTEP.

16.  Prepare the jobdeck and schedule files.

Updated: September 25, 2006, Ian Jasper Agulo