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FABRICATION PROCESSES

E-Beam Processes | Wet Processes

File Conversion to JEOL format | Proximity Correction

Links to Other Processes found in MC2 Webpages

Mask Fabrication | PROXECCO Manual 1 | PROXECCO Manual 2

FILE CONVERSION FROM GDS TO JEOL51 FORMAT

1. Edit your pattern in L-Edit. In principle, you can use any CAD file. But my experience is limited to the use of L-Edit. So, you have to ask other people how to convert files from a CAD program.

2. Convert each layer to *.gds

   1. In Set Up Layers, and then under Import/Export, set GDSII number to zero, and the GDS datatype to the corresponding SHOT RANK number of the layer.

3. Upload the *.gds files to the server vicad1.mc2.chalmers.se in the directory CAD_DATA, i. e. SYS$USER:[ACCOUNTNAME.CAD_DATA].

   a. Open the F-Secure SSH File Transfer and log-in to the vicad1 server.

   b. Simply drag the GDS file to the SECURE SHELL window.

   c. COPY the GDS file to the CAD_DATA directory.

4. Go to the directory CAD_DATA.

5. Do GDSRECFIX for each gds file you transferred. Syntax: GDSRECFIX FILENAME.GDS

6. Go to the directory SCRIPTS.

7. Edit FILENAME.JBX file that you are going to use.

8. Do EBCONV. Syntax: EBCONV FILENAME.JBX /OVERRIDE for all the files. For each file, change the INPUT_FILENAME, OUTPUT_FILENAME and LAYER_NAME

9.  To check the structure and see if the files are converted correctly into JEOL51 format:

   1. Type JBXFILER on the terminal.

   2. Select the *.j51 file you want to see by clicking once.

   3. Click command (C) and convert to graphic data.

   4. Input and output directory is in SYS$DISK. Put the same filename as the j51 file

   5. Select the *.pchk file you want to see.

   6. Click command (C) and display data.

   7. Click DRAW to see the whole picture.

   OR

   1. Use the software J51VMDI.EXE which you can get from Bengt or from the MC2AXP1 server if you have an fy.chalmers.se account.

   2. Choose FILL 'ON' and SHOT '8 COLORS' or '16 COLORS', if you have shot modulation.

10.  Go to fyvax7. You can do this by typing this command: set host fyvax7, and then log-in.

11.  Go to the JEOL51 or PATMNG directory.

12.  To transfer your file from VICAD1 to FYVAX7, type: COPY VICAD1::[USERNAME.JEOL51]FILENAME.J51;* FILENAME.J51;*.

13.  Do GETSTEP to determine the shot modulation. Input the parameters to be used for exposure.

14.  Do PREADSX. Use the values for the SCAN STEP and RESIZE determined from GETSTEP.

15.  Prepare the jobdeck and schedule files.

Updated: January 26, 2005, Ian Jasper Agulo