Materials
Science
Vacuum
Plasma
Thin Film Deposition 1: PVD,
PLD, and Sputtering
Diffusion,
Oxidation, and Doping
CVD
Thin-film Nucleation
Thin Film Depostion 2: Epitaxy
Photolithography
E-beam lithography
Interdiffusion etc.
Film Structure
Device Fabrication 1, 2, 3
& Packaging
Characterization
and Properties
Micromachining